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Laser-induced etching of polycrystalline Al2O3TiC in KOH aqueous solution

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Published in:	Applied physics. A, Materials science & processing Materials science & processing, 1996, Vol.62 (1), p.43-49
Main Authors:	LU, Y.-F, YE, K.-D
Format:	Article
Language:	English
Subjects:	Applied sciences Cross-disciplinary physics: materials science rheology Electronics Exact sciences and technology Lithography, masks and pattern transfer Materials science Microelectronic fabrication (materials and surfaces technology) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Surface cleaning, etching, patterning Surface treatments
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ispartof	Applied physics. A, Materials science & processing, 1996, Vol.62 (1), p.43-49
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source	SpringerLink Online Journals Archive Complete
subjects	Applied sciences Cross-disciplinary physics: materials science rheology Electronics Exact sciences and technology Lithography, masks and pattern transfer Materials science Microelectronic fabrication (materials and surfaces technology) Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Surface cleaning, etching, patterning Surface treatments
title	Laser-induced etching of polycrystalline Al2O3TiC in KOH aqueous solution
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