Optodynamic analysis of direct laser writing of graduation lines

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 1996, Vol.62 (1), p.77-82
Main Authors: KOPAC, S, PIRS, J, MOZINA, J
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0947-8396
1432-0630
DOI:10.1007/bf01568091