Kinetics of O2 + TEOS gas-phase chemical reactions in a remote RF plasma reactor with electron spin resonance

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Bibliographic Details
Published in:Plasma chemistry and plasma processing 1996-06, Vol.16 (2), p.187-194
Main Authors: Janča, J., Tálský, A., Zvoníček, V.
Format: Article
Language:English
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ISSN:0272-4324
1572-8986
DOI:10.1007/BF01570177