Microstructure of reactively sputtered oxide diffusion barriers

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Bibliographic Details
Published in:Journal of electronic materials 1988-09, Vol.17 (5), p.425-432
Main Authors: Kolawa, E., Nieh, C. W., So, F. C. T., Nicolet, M. -A.
Format: Article
Language:English
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ISSN:0361-5235
1543-186X
DOI:10.1007/BF02652129