Microstructure of reactively sputtered oxide diffusion barriers

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Published in:Journal of electronic materials 1988-09, Vol.17 (5), p.425-432
Main Authors: Kolawa, E., Nieh, C. W., So, F. C. T., Nicolet, M. -A.
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Language:English
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ispartof Journal of electronic materials, 1988-09, Vol.17 (5), p.425-432
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source Springer LINK Archives
title Microstructure of reactively sputtered oxide diffusion barriers
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