Vertical silicon membrane arrays patterned with tri-level e-beam resist

Saved in:
Bibliographic Details
Published in:Journal of electronic materials 1982-09, Vol.11 (5), p.883-888
Main Authors: Hu, E. L., Tennant, D. M., Howard, R. E., Jackel, L. D., Grabbe, P.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0361-5235
1543-186X
DOI:10.1007/BF02658903