Vertical silicon membrane arrays patterned with tri-level e-beam resist

Saved in:
Bibliographic Details
Published in:Journal of electronic materials 1982-09, Vol.11 (5), p.883-888
Main Authors: Hu, E. L., Tennant, D. M., Howard, R. E., Jackel, L. D., Grabbe, P.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c229t-8fa206d8e5f61026945727972ea420af33dd247863db272d8cb270c03ffaa0643
cites cdi_FETCH-LOGICAL-c229t-8fa206d8e5f61026945727972ea420af33dd247863db272d8cb270c03ffaa0643
container_end_page 888
container_issue 5
container_start_page 883
container_title Journal of electronic materials
container_volume 11
creator Hu, E. L.
Tennant, D. M.
Howard, R. E.
Jackel, L. D.
Grabbe, P.
description
doi_str_mv 10.1007/BF02658903
format article
fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1007_BF02658903</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1007_BF02658903</sourcerecordid><originalsourceid>FETCH-LOGICAL-c229t-8fa206d8e5f61026945727972ea420af33dd247863db272d8cb270c03ffaa0643</originalsourceid><addsrcrecordid>eNpFkMFKxDAUAIMoWFcvfkHOQvQladL0qIu7CgteVLyV1_QFI213SYKyf--Kgqe5DcMwdinhWgI0N3crUNa4FvQRq6SptZDOvh2zCrSVwihtTtlZzh8A0kgnK7Z-pVSix5HnOEa_nflEU59wJo4p4T7zHZZCaaaBf8XyzkuKYqRPGjmJnnDiiXLM5ZydBBwzXfxxwV5W98_LB7F5Wj8ubzfCK9UW4QIqsIMjE6w8pLa1aVTTNoqwVoBB62FQdeOsHnrVqMH5A8CDDgERbK0X7OrX69M250Sh26U4Ydp3ErqfBd3_Av0NSP9N0Q</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Vertical silicon membrane arrays patterned with tri-level e-beam resist</title><source>Springer LINK Archives</source><creator>Hu, E. L. ; Tennant, D. M. ; Howard, R. E. ; Jackel, L. D. ; Grabbe, P.</creator><creatorcontrib>Hu, E. L. ; Tennant, D. M. ; Howard, R. E. ; Jackel, L. D. ; Grabbe, P.</creatorcontrib><identifier>ISSN: 0361-5235</identifier><identifier>EISSN: 1543-186X</identifier><identifier>DOI: 10.1007/BF02658903</identifier><language>eng</language><ispartof>Journal of electronic materials, 1982-09, Vol.11 (5), p.883-888</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c229t-8fa206d8e5f61026945727972ea420af33dd247863db272d8cb270c03ffaa0643</citedby><cites>FETCH-LOGICAL-c229t-8fa206d8e5f61026945727972ea420af33dd247863db272d8cb270c03ffaa0643</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Hu, E. L.</creatorcontrib><creatorcontrib>Tennant, D. M.</creatorcontrib><creatorcontrib>Howard, R. E.</creatorcontrib><creatorcontrib>Jackel, L. D.</creatorcontrib><creatorcontrib>Grabbe, P.</creatorcontrib><title>Vertical silicon membrane arrays patterned with tri-level e-beam resist</title><title>Journal of electronic materials</title><issn>0361-5235</issn><issn>1543-186X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1982</creationdate><recordtype>article</recordtype><recordid>eNpFkMFKxDAUAIMoWFcvfkHOQvQladL0qIu7CgteVLyV1_QFI213SYKyf--Kgqe5DcMwdinhWgI0N3crUNa4FvQRq6SptZDOvh2zCrSVwihtTtlZzh8A0kgnK7Z-pVSix5HnOEa_nflEU59wJo4p4T7zHZZCaaaBf8XyzkuKYqRPGjmJnnDiiXLM5ZydBBwzXfxxwV5W98_LB7F5Wj8ubzfCK9UW4QIqsIMjE6w8pLa1aVTTNoqwVoBB62FQdeOsHnrVqMH5A8CDDgERbK0X7OrX69M250Sh26U4Ydp3ErqfBd3_Av0NSP9N0Q</recordid><startdate>198209</startdate><enddate>198209</enddate><creator>Hu, E. L.</creator><creator>Tennant, D. M.</creator><creator>Howard, R. E.</creator><creator>Jackel, L. D.</creator><creator>Grabbe, P.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>198209</creationdate><title>Vertical silicon membrane arrays patterned with tri-level e-beam resist</title><author>Hu, E. L. ; Tennant, D. M. ; Howard, R. E. ; Jackel, L. D. ; Grabbe, P.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c229t-8fa206d8e5f61026945727972ea420af33dd247863db272d8cb270c03ffaa0643</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1982</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hu, E. L.</creatorcontrib><creatorcontrib>Tennant, D. M.</creatorcontrib><creatorcontrib>Howard, R. E.</creatorcontrib><creatorcontrib>Jackel, L. D.</creatorcontrib><creatorcontrib>Grabbe, P.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of electronic materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hu, E. L.</au><au>Tennant, D. M.</au><au>Howard, R. E.</au><au>Jackel, L. D.</au><au>Grabbe, P.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Vertical silicon membrane arrays patterned with tri-level e-beam resist</atitle><jtitle>Journal of electronic materials</jtitle><date>1982-09</date><risdate>1982</risdate><volume>11</volume><issue>5</issue><spage>883</spage><epage>888</epage><pages>883-888</pages><issn>0361-5235</issn><eissn>1543-186X</eissn><doi>10.1007/BF02658903</doi><tpages>6</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0361-5235
ispartof Journal of electronic materials, 1982-09, Vol.11 (5), p.883-888
issn 0361-5235
1543-186X
language eng
recordid cdi_crossref_primary_10_1007_BF02658903
source Springer LINK Archives
title Vertical silicon membrane arrays patterned with tri-level e-beam resist
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T21%3A05%3A48IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Vertical%20silicon%20membrane%20arrays%20patterned%20with%20tri-level%20e-beam%20resist&rft.jtitle=Journal%20of%20electronic%20materials&rft.au=Hu,%20E.%20L.&rft.date=1982-09&rft.volume=11&rft.issue=5&rft.spage=883&rft.epage=888&rft.pages=883-888&rft.issn=0361-5235&rft.eissn=1543-186X&rft_id=info:doi/10.1007/BF02658903&rft_dat=%3Ccrossref%3E10_1007_BF02658903%3C/crossref%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c229t-8fa206d8e5f61026945727972ea420af33dd247863db272d8cb270c03ffaa0643%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true