Characterization of germanium implanted Si1-xGex layer

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Bibliographic Details
Published in:Journal of electronic materials 1993, Vol.22 (1), p.125-128
Main Authors: ASHAWANT GUPTA, COOK, C, TOYOSHIBA, L, JIANMIN QIAO, YANG, C. Y, SHOJI, K.-I, FUKAMI, A, NAGANO, T, TOKUYAMA, T
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0361-5235
1543-186X
DOI:10.1007/BF02665734