The properties of Si/Si1-xGex films grown on Si substrates by chemical vapor deposition

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Bibliographic Details
Published in:Journal of electronic materials 1983-07, Vol.12 (4), p.637-651
Main Authors: Manasevit, H. M., Gergis, I. S., Jones, A. B.
Format: Article
Language:English
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ISSN:0361-5235
1543-186X
DOI:10.1007/BF02676793