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Ion Figuring of Light-Weighted Aspherical Mirrors
High accuracy surface figuring of light-weighted aspherical optical mirrors using conventional polishingtechniques becomes increasingly difficult with size as problems such as tool footprint, edge turndown become severe. Hence, a non-contact polishing process called “ion figuring” was evolved where...
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Published in: | Journal of optics (New Delhi) 2008-12, Vol.37 (4), p.115-121 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | High accuracy surface figuring of light-weighted aspherical optical mirrors using conventional polishingtechniques becomes increasingly difficult with size as problems such as tool footprint, edge turndown become severe. Hence, a non-contact polishing process called “ion figuring” was evolved where in material removal is done by energetic ion bombardment. In this paper the development of an ion figuring system based on ion beam sputtering process shall be described and demonstrated with a few examples. |
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ISSN: | 0972-8821 0974-6900 |
DOI: | 10.1007/BF03354846 |