Auger investigations of thin SiC films

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Bibliographic Details
Published in:Fresenius' journal of analytical chemistry 1998-08, Vol.361 (6-7), p.564-568
Main Authors: ECKE, G, RÖSSLER, H, CIMALLA, V, PEZOLDT, J, STAUDEN, T
Format: Article
Language:English
Subjects:
Chemical composition analysis, chemical depth and dopant profiling
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Electron and ion emission by liquids and solids
impact phenomena
Electron impact: auger emission
Exact sciences and technology
Impact phenomena (including electron spectra and sputtering)
Materials science
Materials testing
Physics
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Summary:
ISSN:0937-0633
1432-1130
DOI:10.1007/s002160050949