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Auger investigations of thin SiC films
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| Published in: | Fresenius' journal of analytical chemistry 1998-08, Vol.361 (6-7), p.564-568 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Citations: | Items that cite this one |
| Online Access: | Get full text |
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| cited_by | cdi_FETCH-LOGICAL-c264t-781e68ea8437b8730c0abc0d46fee8e2695c6a147ed9b4b56fc0575fdfc6c2e03 |
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| cites | |
| container_end_page | 568 |
| container_issue | 6-7 |
| container_start_page | 564 |
| container_title | Fresenius' journal of analytical chemistry |
| container_volume | 361 |
| creator | ECKE, G RÖSSLER, H CIMALLA, V PEZOLDT, J STAUDEN, T |
| description | |
| doi_str_mv | 10.1007/s002160050949 |
| format | article |
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| fulltext | fulltext |
| identifier | ISSN: 0937-0633 |
| ispartof | Fresenius' journal of analytical chemistry, 1998-08, Vol.361 (6-7), p.564-568 |
| issn | 0937-0633 1432-1130 |
| language | eng |
| recordid | cdi_crossref_primary_10_1007_s002160050949 |
| source | Springer Nature |
| subjects | Chemical composition analysis, chemical depth and dopant profiling Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Electron and ion emission by liquids and solids impact phenomena Electron impact: auger emission Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Materials science Materials testing Physics |
| title | Auger investigations of thin SiC films |
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