XPS investigations on boron nitride fibre coatings prepared by chemical vapour deposition in comparison to their hydrolytic rate

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Bibliographic Details
Published in:Fresenius' journal of analytical chemistry 1998-08, Vol.361 (6-7), p.653-655
Main Authors: DIETRICH, D, STÖCKEL, S, MARX, G
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0937-0633
1432-1130
DOI:10.1007/s002160050982