Quantitative investigation of boron incorporation in polycrystalline CVD diamond films by SIMS

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Bibliographic Details
Published in:Fresenius' journal of analytical chemistry 1999-12, Vol.365 (8), p.636-641
Main Authors: KOLBER, T, PIPLITS, K, HAUBNER, R, HUTTER, H
Format: Article
Language:English
Subjects:
Chemical composition analysis, chemical depth and dopant profiling
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Materials testing
Physics
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ISSN:0937-0633
1432-1130
DOI:10.1007/s002160051537