Study of phase separation in Ti-Co-N thin films on silicon substrate

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 1997-05, Vol.64 (5), p.517-521
Main Authors: Gromov, D.G., Mochalov, A.I., Pugachevich, V.P., Kirilenko, E.P., Trifonov, A.Y.
Format: Article
Language:English
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ISSN:0947-8396
1432-0630
DOI:10.1007/s003390050510