Super-lateral-growth regime analysis in long-pulse-duration excimer-laser crystallization of a-Si films on SiO 2

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 1999-06, Vol.68 (6), p.631-635
Main Authors: Fogarassy, E., de Unamuno, S., Prevot, B., Boher, P., Stehle, M., Pribat, D.
Format: Article
Language:eng ; jpn
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ISSN:0947-8396
1432-0630
DOI:10.1007/s003390050952