Three-dimensional effects in dry laser cleaning

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2003-07, Vol.77 (2), p.209-215
Main Authors: Luk‘yanchuk, B.S., Arnold, N., Huang, S.M., Wang, Z.B., Hong, M.H.
Format: Article
Language:English
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ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-003-2139-z