Deposition of nanocomposite TiN-Si3N4 thin films by hybrid cathodic arc and chemical vapor process

Saved in:
Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2005-06, Vol.81 (1), p.151-158
Main Authors: BENDAVID, A, MARTIN, P. J, CAIRNEY, J, HOFFMAN, M, FISCHER-CRIPPS, A. C
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Mechanical and acoustical properties of condensed matter
Mechanical properties of solids
Nanoscale materials and structures: fabrication and characterization
Other topics in nanoscale materials and structures
Physics
Tribology and hardness
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-004-2951-0