Deep trench etching in macroporous silicon

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2006-08, Vol.84 (3), p.237-242
Main Authors: GEPPERT, T, SCHWEIZER, S. L, GÖSELE, U, WEHRSPOHN, R. B
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
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ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-006-3628-7