Nanocomposite TiN films with embedded MoS2 inorganic fullerenes produced by combining supersonic cluster beam deposition with cathodic arc reactive evaporation

• Published in: Applied physics. A, Materials science & processing Materials science & processing, 2008-01, Vol.90 (1), p.101-104
• Main Authors: Piazzoni, C., Blomqvist, M., Podestà, A., Bardizza, G., Bonati, M., Piseri, P., Milani, P., Davies, C., Hatto, P., Ducati, C., Sedláčková, K., Radnóczi, G.
• Format: Article
• Language: English
• Subjects: Characterization and Evaluation of Materials; Condensed Matter Physics; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Machines; Manufacturing; Materials science; Nanoscale materials and structures: fabrication and characterization; Nanotechnology; Optical and Electronic Materials; Physics; Physics and Astronomy; Processes; Rapid Communication; Surfaces and Interfaces; Thin Films
• ISSN: 0947-8396; 1432-0630
• DOI: 10.1007/s00339-007-4292-2

We report the production and characterization of nanocomposite thin films consisting of a titanium nitride matrix with embedded molybdenum disulphide fullerene-like nanoparticles. This was achieved by combining a cluster source generating a pulsed supersonic beam of MoS 2 clusters with an industrial cathodic arc reactive evaporation apparatus used for TiN deposition. Cluster-assembled films show the presence of MoS 2 nanocages and nanostructures and the survival of such structures dispersed in the TiN matrix in the co-deposited samples. Nanotribological characterization by atomic force microscopy shows that the presence of MoS 2 nanoparticles even in very low concentration modifies the behaviour of the TiN matrix.