Dual metamaterial structures generated from an one-step fabrication using stencil lithography

The flexibility to deposit metallic structures on any substrates without the need of lift-off or etching process are the main reasons for the recent popularity of using stencil lithography for plasmonic applications. In this work, we fabricate nanoholes on a Si 3 N 4 membrane and deposit metal–diele...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2014-09, Vol.116 (3), p.907-912
Main Authors: Leong, Eunice S. P., Deng, J., Liu, Y. J., Teng, J. H.
Format: Article
Language:English
Subjects:
Characterization and Evaluation of Materials
Condensed Matter Physics
Machines
Manufacturing
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Surfaces and Interfaces
Thin Films
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Summary:The flexibility to deposit metallic structures on any substrates without the need of lift-off or etching process are the main reasons for the recent popularity of using stencil lithography for plasmonic applications. In this work, we fabricate nanoholes on a Si 3 N 4 membrane and deposit metal–dielectric layers and such approach allows us to have a perforated fishnet metamaterial structure on the membrane as well as its complementary pillar structure on a quartz substrate. We then studied and compared their optical properties from both experiment and simulation results.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-014-8461-9