Dual metamaterial structures generated from an one-step fabrication using stencil lithography

The flexibility to deposit metallic structures on any substrates without the need of lift-off or etching process are the main reasons for the recent popularity of using stencil lithography for plasmonic applications. In this work, we fabricate nanoholes on a Si 3 N 4 membrane and deposit metal–diele...

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Published in:Applied physics. A, Materials science & processing Materials science & processing, 2014-09, Vol.116 (3), p.907-912
Main Authors: Leong, Eunice S. P., Deng, J., Liu, Y. J., Teng, J. H.
Format: Article
Language:English
Subjects:
Characterization and Evaluation of Materials
Condensed Matter Physics
Machines
Manufacturing
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Surfaces and Interfaces
Thin Films
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description The flexibility to deposit metallic structures on any substrates without the need of lift-off or etching process are the main reasons for the recent popularity of using stencil lithography for plasmonic applications. In this work, we fabricate nanoholes on a Si 3 N 4 membrane and deposit metal–dielectric layers and such approach allows us to have a perforated fishnet metamaterial structure on the membrane as well as its complementary pillar structure on a quartz substrate. We then studied and compared their optical properties from both experiment and simulation results.
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subjects Characterization and Evaluation of Materials
Condensed Matter Physics
Machines
Manufacturing
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Surfaces and Interfaces
Thin Films
title Dual metamaterial structures generated from an one-step fabrication using stencil lithography
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