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Ianus, the three-electrode excimer laser
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Published in: | Applied physics. B, Lasers and optics Lasers and optics, 1998-04, Vol.66 (4), p.401-406 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0946-2171 1432-0649 |
DOI: | 10.1007/s003400050409 |