Near-infrared waveguide formation and RBS/channeling spectrometry analysis for damage in calcium barium niobate crystals via ion implantation

We report on the fabrication of planar waveguide structures in calcium barium niobate crystals via C ion implantation at room temperature. The SRIM code was applied to calculate damage profiles of the C ions implanted into Ca 0.32 Ba 0.68 Nb 2 O 6 crystals. The low-damage profiles in the near-surfac...

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Bibliographic Details
Published in:Applied physics. B, Lasers and optics Lasers and optics, 2015-11, Vol.121 (2), p.135-139
Main Authors: Zhang, Lian, Zhao, Jin-Hua, Gao, Wen-Lan, Liu, Peng, Zhou, Yu-Fan, Yu, Xiao-Fei, Wang, Tie-Jun, Song, Hong-Lian, Qiao, Mei, Wang, Xue-Lin
Format: Article
Language:English
Subjects:
Engineering
Lasers
Optical Devices
Optics
Photonics
Physical Chemistry
Physics
Physics and Astronomy
Quantum Optics
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Summary:We report on the fabrication of planar waveguide structures in calcium barium niobate crystals via C ion implantation at room temperature. The SRIM code was applied to calculate damage profiles of the C ions implanted into Ca 0.32 Ba 0.68 Nb 2 O 6 crystals. The low-damage profiles in the near-surface of the implanted regions were verified by Rutherford backscattering/channeling spectrometry. The waveguide characteristics were investigated in the near-infrared bands. The propagation loss of the waveguide was estimated to be 0.88 dB/cm.
ISSN:0946-2171
1432-0649
DOI:10.1007/s00340-015-6210-1