Microfactories ; new applications of micromachine technology to the manufacture of small products

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 1997-02, Vol.3 (2), p.37-41
Main Authors: KAWAHARA, N, SUTO, T, HIRANO, T, ISHIKAWA, Y, KITAHARA, T, OOYAMA, N, ATAKA, T
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Mechanical engineering. Machine design
Precision engineering, watch making
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ISSN:0946-7076
1432-1858
DOI:10.1007/s005420050052