Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 1999, Vol.5 (4), p.161-165
Main Authors: KAMIYA, D, HAYAMA, T, HORIE, M
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Physics
Precision engineering, watch making
Servo and control equipment
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ISSN:0946-7076
1432-1858
DOI:10.1007/s005420050157