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Injection molding of polymeric LIGA HARMs
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Published in: | Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 1999, Vol.6 (2), p.60-66 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0946-7076 1432-1858 |
DOI: | 10.1007/s005420050176 |