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Sub-micron coatings with low friction and wear for micro actuators

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Bibliographic Details
Published in:	Microsystem technologies 2002-03, Vol.8 (1), p.51-54
Main Authors:	BANDORF, R, LÜTHJE, H, SCHIFFMANN, K, STAEDLER, T, WORTMANN, A
Format:	Article
Language:	English
Subjects:	Applied sciences Exact sciences and technology Friction, wear, lubrication General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Machine components Mechanical engineering. Machine design Physics Precision engineering, watch making Transducers
Citations:	Items that cite this one
Online Access:	Get full text
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