Moving mask deep X-ray lithography system with multi stage for 3-D microfabrication

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2002-05, Vol.8 (2-3), p.93-98
Main Authors: TABATA, O, YOU, H, MATSUZUKA, N, YAMAJI, T, UEMURA, S, DAMA, I
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Precision engineering, watch making
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ISSN:0946-7076
1432-1858
DOI:10.1007/S00542-001-0168-0