Microfabrication of freedom and articulated alumina-based components

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2002-09, Vol.8 (6), p.368-374
Main Authors: Monneret, S., Provin, C., Le Gall, H., Corbel, S.
Format: Article
Language:English
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-002-0192-8