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Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2004, Vol.10 (2), p.137-141
Main Authors: CUI, T, MARKUS, D, ZURN, S, POLLA, D. L
Format: Article
Language:English
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ISSN:0946-7076
1432-1858
DOI:10.1007/S00542-003-0319-6