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Knowledge-based design environment for primary shaped micro parts

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Bibliographic Details
Published in:	Microsystem technologies 2005-04, Vol.11 (4-5), p.254-260
Main Authors:	ALBERS, A, BURKARDT, N, HAUSER, S, MARZ, J
Format:	Article
Language:	English
Subjects:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations:	Items that cite this one
Online Access:	Get full text
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