Finite element method analysis and control of micro actuator with piezoelectric element for spinstand

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Bibliographic Details
Published in:Microsystem technologies 2005-08, Vol.11 (8-10), p.606-611
Main Authors: NAGANAWA, Akihiro, MORI, Shigeki, TADA, Hirohiko, SHIBUYA, Yotsugi, OBINATA, Goro, OUCHI, Kazuhiro
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Magnetic and optical mass memories
Storage and reproduction of information
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-005-0530-8