Finite element method analysis and control of micro actuator with piezoelectric element for spinstand

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Published in:Microsystem technologies 2005-08, Vol.11 (8-10), p.606-611
Main Authors: NAGANAWA, Akihiro, MORI, Shigeki, TADA, Hirohiko, SHIBUYA, Yotsugi, OBINATA, Goro, OUCHI, Kazuhiro
Format: Article
Language:English
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Applied sciences
Electronics
Exact sciences and technology
Magnetic and optical mass memories
Storage and reproduction of information
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creator NAGANAWA, Akihiro
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subjects Applied sciences
Electronics
Exact sciences and technology
Magnetic and optical mass memories
Storage and reproduction of information
title Finite element method analysis and control of micro actuator with piezoelectric element for spinstand
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