Wet etching of silicon gratings with triangular profiles

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Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2005-11, Vol.11 (12), p.1287-1291
Main Authors: FRÜHAUF, J, KRÖNERT, S
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ispartof Microsystem technologies : sensors, actuators, systems integration, 2005-11, Vol.11 (12), p.1287-1291
issn 0946-7076
1432-1858
language eng
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source Springer Nature
subjects Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Wet etching of silicon gratings with triangular profiles
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