Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization

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Bibliographic Details
Published in:Microsystem technologies 2007-03, Vol.13 (5-6), p.547-550
Main Authors: MOCHIZUKI, Hiroaki, MEKARU, Harutaka, KUSUMI, Shinji, SATO, Noriaki, SHIMIZU, Masami, YAMASHITA, Michiru, SHIMADA, Osamu, HATTORI, Tadashi
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Foundry engineering
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Metals. Metallurgy
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Other casting methods. Solidification
Physics
Precision engineering, watch making
Production techniques
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-006-0230-z