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Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors

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Bibliographic Details
Published in:	Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2007-04, Vol.13 (7), p.715-722
Main Authors:	REZAZADEH, Ghader, KHATAMI, Faraz, TAHMASEBI, Ahmadali
Format:	Article
Language:	English
Subjects:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Optical and optoelectronic circuits Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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