Study of a piezoelectric multimorph based micro-scanner

• Published in: Microsystem technologies 2008-07, Vol.14 (7), p.963-969
• Main Authors: Chaehoi, A., Begbie, M.
• Format: Article
• Language: English
• Subjects: Applied sciences; Electronics; Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical Engineering; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Nanotechnology; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Technical Paper
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-007-0496-9

This paper concerns the modeling of a piezoelectric micro-scanner. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. A complete analytical model of the piezoelectric micro-scanner is presented. Each step of the modeling has been validated by Finite Element Modeling. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon micro-scanner, is intended for further HDL integration, thereby allowing rapid system level simulation and optimization.