Nickel stamp fabrication and hot embossing for mass-production of micro/nano combined structures using anodic aluminum oxide

Recently, “micro/nano combined structure” has attracted many researchers’ attentions due to its high potential in various research fields and applications such as biomimetics, tissue engineering, micro systems for biochemical analysis and so forth. The present paper proposes a simple and promising m...

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Bibliographic Details
Published in:Microsystem technologies 2008-10, Vol.14 (9-11), p.1689-1694
Main Authors: Park, Jang Min, Kim, Nam Hyo, Lee, Bong-Kee, Lee, Kun-Hong, Kwon, Tai Hun
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Electronics and Microelectronics
Engineering
Exact sciences and technology
Instrumentation
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Machinery and processing
Mechanical Engineering
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Moulding
Nanotechnology
Physics
Plastics
Polymer industry, paints, wood
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Technical Paper
Technology of polymers
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Summary:Recently, “micro/nano combined structure” has attracted many researchers’ attentions due to its high potential in various research fields and applications such as biomimetics, tissue engineering, micro systems for biochemical analysis and so forth. The present paper proposes a simple and promising method for mass-production of the micro/nano combined structure, in particular, nano dimple array with micro structures with cost-effective procedures. Three major procedures of (a) master template fabrication; (b) nickel electroforming onto the master template; (c) replication by hot embossing process, are employed: the master template is fabricated by utilizing an anodic aluminium oxide (AAO) process and UV lithography technique; nickel stamp is then obtained by means of electroforming onto the master template; finally, micro/nano combined structures are moulded on a polymethyl methacrylate (PMMA) substrate using the nickel stamp via hot embossing. So replicated micro/nano combined structures turns out to be quite successful according to experimental observation via scanning electron microscope (SEM) and atomic force microscope (AFM).
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-007-0504-0