Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007

Saved in:
Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2008-10, Vol.14 (9-11), p.1215-1216
Main Authors: Khan Malek, Chantal, Saile, Volker, Michel, Bernd
Format: Article
Language:English
Subjects:
Editorial
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-008-0588-1