Development of piezoelectric MEMS deformable mirror

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2011-06, Vol.17 (5-7), p.931-935
Main Authors: Sato, Masashi, Tsuda, Shogo, Kanno, Isaku, Kotera, Hidetoshi, Tabata, Osamu
Format: Article
Language:English
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-010-1190-x