RF-MEMS switch actuation pulse optimization using Taguchi’s method

Reliability and longevity comprise two of the most important concerns when designing micro-electro-mechanical-systems (MEMS) switches. Forcing the switch to perform close to its operating limits underlies a trade-off between response bandwidth and fatigue life due to the impact force of the cantilev...

Full description

Saved in:
Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2011-08, Vol.17 (8), p.1351-1359
Main Authors: Spasos, M., Tsiakmakis, K., Charalampidis, N., Nilavalan, R.
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Electronics and Microelectronics
Engineering
Exact sciences and technology
Experimental design
Instrumentation
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematics
Mechanical Engineering
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Nanotechnology
Operational research and scientific management
Operational research. Management science
Physics
Probability and statistics
Reliability theory. Replacement problems
Sciences and techniques of general use
Statistics
Technical Paper
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Reliability and longevity comprise two of the most important concerns when designing micro-electro-mechanical-systems (MEMS) switches. Forcing the switch to perform close to its operating limits underlies a trade-off between response bandwidth and fatigue life due to the impact force of the cantilever touching its corresponding contact point. This paper presents for first time an actuation pulse optimization technique based on Taguchi’s optimization method to optimize the shape of the actuation pulse of an ohmic RF-MEMS switch in order to achieve better control and switching conditions. Simulation results show significant reduction in impact velocity (which results in less than 5 times impact force than nominal step pulse conditions) and settling time maintaining good switching speed for the pull down phase and almost elimination of the high bouncing phenomena during the release phase of the switch.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-011-1312-0