Development of a flexible three-axial tactile sensor array for a robotic finger

• Published in: Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2011-12, Vol.17 (12), p.1721-1726
• Main Authors: Kwon, Hyun-Joon, Kim, Jong-Ho, Choi, Woo-Chang
• Format: Article
• Language: English
• Subjects: Applied sciences; Computer science; control theory; systems; Control theory. Systems; Electronics and Microelectronics; Engineering; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Instrumentation; Measurement and testing methods; Mechanical Engineering; Mechanical engineering. Machine design; Nanotechnology; Physics; Precision engineering, watch making; Robotics; Solid mechanics; Structural and continuum mechanics; Technical Paper
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-011-1368-x

In this paper, we propose a flexible three-axial tactile sensor array for measuring both normal and shear loads. The sensor array has 16 tactile sensor units based on piezoresistive strain gauge. It is constructed on a Kapton polyimide film using advanced polymer micromachining technologies. Thin metal strain gauges are embedded in polyimide to measure normal and shear loads, which are tested by applying forces from 0 to 1 N. The developed sensor unit had a hysteresis error of about 9% and repeatability error of about 1.31%. The sensor showed a good resulting image when pressed by a circle-shaped object with 10 N loads. The proposed flexible three-axial tactile sensor array can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic finger.