Fabrication of polymer micro-tip by optical lensing technique

• Published in: Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2012-05, Vol.18 (5), p.623-628
• Main Authors: Dey, Pradip Kumar, Das, Soumen, Ganguly, Pranabendu
• Format: Article
• Language: English
• Subjects: Applied sciences; Circuit properties; Electric, optical and optoelectronic circuits; Electronics; Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated optics. Optical fibers and wave guides; Mechanical Engineering; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Nanotechnology; Optical and optoelectronic circuits; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Technical Paper
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-012-1483-3

Fabrication of polymer micro-tips using SU-8 negative photoresist for bio-applications is reported. The SU-8 processing technology and isotropic glass etching process have been developed and utilized to fabricate micro-tips on glass substrate by applying optical lensing effect during photolithography. Experimentally, micro-tips of 25 μm base diameter, ~1 μm tip diameter, and ~250 μm height, have been demonstrated.