Fabrication methods for the manufacture of sapphire microparts

There is an increasing demand for microparts to be fabricated from an extremely hard-wearing, durable material such as sapphire but machining it to demanding specifications and tolerances poses considerable challenges. This paper describes experimental results obtained from laser machining and diamo...

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2012-11, Vol.18 (11), p.1835-1841
Main Authors: Allen, David M., Redondo, Roxana, Dany, Maximilien
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
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Summary:There is an increasing demand for microparts to be fabricated from an extremely hard-wearing, durable material such as sapphire but machining it to demanding specifications and tolerances poses considerable challenges. This paper describes experimental results obtained from laser machining and diamond machining of sapphire and concludes that, for optimum machining, a combination of these two techniques is required.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-012-1484-2