In-situ fabrication of an out-of-plane microlens with pre-definable focal length

• Published in: Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2013-11, Vol.19 (11), p.1823-1828
• Main Authors: Shao, Guocheng, Cai, Ziliang, Miao, Zhengyu, Wang, Wanjun
• Format: Article
• Language: English
• Subjects: Electronics and Microelectronics; Engineering; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Instrumentation; Lenses, prisms, and mirrors; Mechanical Engineering; Nanotechnology; Optical elements, devices, and systems; Optics; Physics; Technical Paper
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-013-1762-7

Out-of-plane microlenses are an important component for integrated optics. Unlike their in-plane counterparts, the fabrication of out-of-plane microlenses is more complicated, which limits their applications. In this paper, a new technique that is capable of fabricating out-of-plane microlenses is described. The resulting lenses have pre-definable focal length and can focus light beams not only in the horizontal plane, but also in the vertical plane. The fabrication process is completely compatible with the soft lithography technique. The lens chamber with two thin polydimethylsiloxane (PDMS) membranes was designed and fabricated together with microfluidic or other components using the same UV lithography mask. The lens was then formed in an in-situ fashion. Curable polymers were injected into the lens chamber and cured while pneumatic pressure was applied to keep the PDMS membranes deformed in a quasi-spherical profile. Pneumatic pressure and membrane thickness can be adjusted to control the resulting lens focal length. With a group of lens chambers with different membrane thickness, a single pressure line can be used to fabricate microlenses with different focal lengths. Since cured polymer was used as the lens filling material, the resulting lens can be used without a pressure source. Different polymers can be selected for desirable optical properties. The simulation and experimental results have proved the feasibility of this technique and resulting lens showed good focusing ability for a divergent light beam from an on-chip multi-mode optical fiber. The small design footprint, total compatibility with soft lithography and technical versatility of this technique make it particularly useful for intergrating out-of-plane microlens into microfluidic chips, which may open new possibilities for the development of on-chip optical detection system.