Micro rate gyros for highly dynamic objects

Modern MEMS gyros are used in many different applications, but still there is an area that is uncovered-highly dynamic objects. It requires shock resistance up to 65,000 g and ability to measure angular velocities up to 10,000°/s. Traditional vibrational micro rate gyros are not able to satisfy thes...

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2014-09, Vol.20 (12), p.2137-2146
Main Authors: Lukyanov, Dmitry, Shevchenko, Sergey, Kukaev, Alexander
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Review Paper
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Summary:Modern MEMS gyros are used in many different applications, but still there is an area that is uncovered-highly dynamic objects. It requires shock resistance up to 65,000 g and ability to measure angular velocities up to 10,000°/s. Traditional vibrational micro rate gyros are not able to satisfy these requirements due to elastic suspensions and proof masses used in their design. That is why a solid-state gyro (SSG) should be constructed. Such devices consist of only a single crystal and accompanying electronics. This paper provides a short introduction to the theoretical framework of surface acoustic wave (SAW) based SSGs and a brief description, analysis and comparison of existing design concepts. It discusses main advantages, problems, and prospects for further development of SAW-based SSGs.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-014-2325-2