Pristine ZnO and SnO2 films for sensing of volatile organic compounds

Volatile organic compounds can cause severe health problems if inhaled in concentration s more than the permissible threshold. This paper presents the experimental sensing study of three different volatile organic compounds (VOCs) viz. ethanol (C 2 H 5 OH), propanol (C 3 H 7 OH) and benzene (C 6 H 6...

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2017-08, Vol.23 (8), p.3027-3031
Main Authors: Prajesh, Rahul, Goyal, Vinay, Bhargava, Jitendra, Sharma, Ashok, Agarwal, Ajay
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
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Summary:Volatile organic compounds can cause severe health problems if inhaled in concentration s more than the permissible threshold. This paper presents the experimental sensing study of three different volatile organic compounds (VOCs) viz. ethanol (C 2 H 5 OH), propanol (C 3 H 7 OH) and benzene (C 6 H 6 ). Sensing experiments are performed on undoped, reactively sputtered films (ZnO/SnO 2 ) integrated with micro-heater and interdigitated electrodes. Process integration is carried out using standard MEMS unit processes. A comprehensive experimental study is carried out to analyze the operating temperature and sensing behavior of the above mentioned volatile organic compounds on SnO 2 and ZnO sensing films. The operating temperature is optimized for maximum sensitivity. Fast response (
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-016-3042-9