Theoretical modal analysis and parameter study of Z-shaped electrothermal microactuators

This paper presents a comprehensive modal analysis of Z-shaped beam electrothermal microactuators for the first time. Both longitudinal and lateral vibrations are taken into account to obtain the vibration equations of the unique geometric feature: a Z-shaped beam with a shuttle in the middle. The n...

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2018-07, Vol.24 (7), p.3149-3160
Main Authors: Zhang, Zhuo, Yu, Yueqing, Zhang, Xuping
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
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Summary:This paper presents a comprehensive modal analysis of Z-shaped beam electrothermal microactuators for the first time. Both longitudinal and lateral vibrations are taken into account to obtain the vibration equations of the unique geometric feature: a Z-shaped beam with a shuttle in the middle. The natural frequencies and the associated mode shapes of the Z-shaped beams are calculated based on the vibration equations subjected to both boundary and continuity conditions. Finite element simulations are performed using ANSYS software to verify the analytically calculated natural frequencies and mode shapes of the Z-shaped beams. Based on the modal analysis, this paper also investigates the relationship between the natural frequencies and volume scale of the Z-shaped beam electrothermal microactuators. In addition, comprehensive parameter analysis is conducted to provide insights and guidance on designing and optimization of the Z-shaped beam electrothermal microactuators.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-018-3709-5