Modelling and analysis of diaphragm integrated SU8/CB nanocomposite piezoresistive polymer microcantilever biosensor

This study investigates the effect of cantilever size and diaphragm size on deflection, frequency, stress and sensitivity characteristics of a diaphragm integrated SU8/CB piezoresistive polymer microcantilever biosensor. It consists SU8 square diaphragm anchored by four SU8 cantilevers with SU8/CB p...

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2018-07, Vol.24 (7), p.3061-3068
Main Authors: Ansari, Mohd. Zahid, Bisen, Mahak, Cho, Chongdu
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
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Summary:This study investigates the effect of cantilever size and diaphragm size on deflection, frequency, stress and sensitivity characteristics of a diaphragm integrated SU8/CB piezoresistive polymer microcantilever biosensor. It consists SU8 square diaphragm anchored by four SU8 cantilevers with SU8/CB piezoresistor inside. Analytical model for biosensor deflection is presented and validated against numerical obtained using ANSYS Multiphysics. Diaphragm size was changed as 305, 505 and 705 µm. Cantilever length and width were first changed independently and then jointly to characterise performance of biosensor. Results show good conformity between analytical and numerical results and the sensitivity results are increasing linearly with diaphragm size, and short and narrow cantilevers show higher sensitivity.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-018-3777-6